非硅微納機電制造領域的工匠精神——埃德萬斯盛大亮相納博會

2016年10月26日，由中華人民共和國科學技術部、中國科學院、江蘇省人民政府、中國科學院上海微系統與信息技術研究所傳感技術聯合國家重點實驗室主辦的，由上海龍媒商務咨詢有限公司、江蘇省納米技術創新中心承辦的“2016傳感器與MEMS技術產業化國際研討會暨科研成果產品展”與“中國國際納米技術產業博覽會（CHInano2016 Conference& Expo）”在蘇州國際博覽中心同期聯合舉辦。

北京埃德萬斯離子束技術研究所有限公司（以下簡稱：埃德萬斯）首次在納博會上盛大亮相，并全面展示了由其自主研發的設備制成的各類樣品，包括藍寶石基底Si膜、Ti膜、Pt膜及10μm厚鋁膜；應用于高頻寬帶光學通信的AlN膜；應用于可穿戴設備、柔性集成電路的柔性材料鍍金屬薄膜；應用于高端新型電子元器件的合金薄膜電阻；應用于航天、導彈、新型雷達的高溫超導射頻器件；以及微機械器件等。

利用埃德萬斯自主研發的設備制成的微結構

可彎折柔性集成電路

埃德萬斯是國內著名的先進商用離子束技術產品專業制造者，前身為在錢學森提議下成立的航天二院23所“離子束技術、工藝及成套設備系統工程部”。公司創始人為國際知名離子束技術專家劉金聲研究員，從上世紀八十年代起，劉金聲老師歷經38年潛心鉆研離子束技術，率先在國內成功研發出離子束技術應用成套設備，成為了國內這一行業的領跑者，為埃德萬斯今日的騰飛打下堅實的基礎。

埃德萬斯多年來一直服務于國內航天、軍工兩大領域，提供工藝技術和配套設備，為國家重大型號任務做出卓著貢獻，如：衛星多軌掃描高分辨率紅外探測器；軍用的紅外成像系統；提供精密慣性制導陀螺生產線，研制光纖陀螺和衛星晶振系統專用離子束系統等。隨著綜合服務能力的提升，逐漸將服務擴大到中科院、清華、北大等頂尖級的國內科研院校，以及美國麻省理工大學、沙特阿卜杜拉國王科技大學等國外名校。起始至今離子束技術應用設備累計提供了200多臺。

同時，在本次國際研討會上，埃德萬斯發言人殷睿婷女士還發表了題為“Application of Ion Beam in Non-silicon MEMS”（離子束技術在非硅MEMS中的應用）的英文演講。演講中提到，隨著應用場景的復雜化、終端產品的多樣化，硅MEMS傳感器應用范圍越來越受局限，眾多國際知名廠商開始注重新材料、新工藝、新技術的開發，國內外MEMS呈現從“硅”到“非硅”的發展趨勢。

據麥姆斯咨詢報道，在近些年的“固態傳感器、執行器及微系統研討會”上（The Solid State Sensors, Actuators and Microsystems Workshop，是最高水平MEMS新技術的展示舞臺，該國際研討會是MEMS領域最具競爭力的會議之一），出現了令硅材料從業者感到不安的趨勢——關于硅材料技術的論文數量逐年降低。在2016年6月的研討會上，僅有53%的演講論文是關于硅材料器件的（只要器件中包含了硅材料，無論是作為被動基底還是活性材料）。

固態傳感器、執行器及微系統研討會中硅基器件演講論文的比例

從過去12年來的演講主題可以清晰的看出，硅材料微型器件的學術研究熱潮已經開始逐漸消退。學術研究人員現在開始專注于開發聚合物和紙基微型器件。利用這些材料開發的器件，不僅工藝環保，而且制作設備簡單、成本較低。相對硅材料，它們大幅縮減了研發經費預算。許多聚合物和紙基微型器件的創新都指向了醫療應用，對該領域來說，生物相容性和材料的柔性是基本要求。

面對這一產業發展趨勢，埃德萬斯自主研發的離子束技術應用設備迎來春天。埃德萬斯第四代離子束技術應用系統可加工材料范圍廣泛，可用于刻蝕加工各種金屬、合金、非金屬、氧化物、氮化物、碳化物、半導體、聚合物、陶瓷、紅外、超導甚至生物組織等各種材料。

埃德萬斯現已初步搭建成“自主設備開發+工藝技術研發+項目加速孵化+代工生產基地”的全產業鏈生態布局。與國內知名加速器企業砹立方合作運營的，由國富資本等多支產業基金對接支持的埃德萬斯微納制造產業加速孵化器即將揭牌。該垂直產業加速孵化器具有高度專注、重度垂直的特點，政府融資加外界資本的介入，將助推企業快速成長。埃德萬斯還計劃在深圳建設代加工生產基。埃德萬斯將一如既往潛心打造設備，加大工藝研發力度，用好產業資本快速孵化，筑造專業代工基地，為我國產業的提升及轉型貢獻力量。

Non Silicon Micro Nano Electromechanical Manufacturing Craftsman Spirit -- ADVANCED Grand Debut Nabo Conference

In October 26, 2016, sponsored by the People's Republic of China science and technology research department, China Academy of Sciences, Jiangsu Provincial People's government, Chinese Shanghai Institute of micro system and information technology statekeylaboratoriesoftransducertechnology, hosted by Shanghai dragon Media Business Consulting Co., Ltd. and Jiangsu province nanotechnology innovation center "2016 sensor and MEMS technology industrialization international Symposium scientific research and product exhibition" and "China international nanotechnology industry expo (CHInano2016 Conference& Expo)" held in Suzhou International Expo Center during the same period.

Beijing advanced ion beam Technology Research Institute Co. Ltd. (hereinafter referred to as: Advanced) debut in nabok grand meeting, and fully demonstrated the made its self-developed equipment all kinds of samples, including sapphire substrate Si film, Ti film, Pt film and 10 m thick aluminum film; AlN film used in high frequency broadband optical communication; flexible materials used in wearable devices, flexible integrated circuit of the metal plating film; alloy thin film resistor used in high-end new electronic components; High Temperature Superconducting RF devices used in aerospace, missile and radar model; and micro mechanical devices etc..

The use of micro structure made of advanced self-developed equipment

Flexible flexible integrated circuit

Ed Vance is the famous domestic advanced commercial ion beam technology products manufacturer, formerly known as Tsien Hsueshen proposed the establishment of second academy 23 "ion beam technology, technology and equipment system engineering department". Company founder of international famous ion beam technology expert Liu Jinsheng researcher, from late 80s onwards, Liu Jinsheng teacher after 38 years of painstaking study of ion beam technology, the first in China successfully developed the application of ion beam technology and equipment, has become the domestic industry leader, a solid foundation for the development of today's advanced.

Advanced years of service in the domestic space, two military areas, to provide technology and equipment, to make outstanding contributions, for major national type tasks such as satellite multitrack scanning high resolution infrared detector; infrared imaging system protection; to provide precision inertial guidance gyroscope production line, development of special ion optical fiber gyro and satellite oscillator system beam system. With the comprehensive service capabilities, service will gradually expand to the Chinese Academy of Sciences, Tsinghua University, Beijing University and other top domestic research institutions, and MIT, Saudi King Abdullah University of science and technology and other foreign schools. Since the beginning, the ion beam technology application equipment has accumulated more than 200 units.

At the same time, the International Symposium on advanced spokesman Ms. Yin Ruiting also published an article entitled "Application of Ion Beam in Non-silicon MEMS" (the application of ion beam technology in non silicon MEMS in the English speech). Mentioned in the speech, with diverse and complex, the terminal product application scenarios, the application range of silicon MEMS sensor is more and more limited, many international well-known manufacturers began to develop new material and technology, focusing on the domestic and foreign MEMS present from "Si" to "non silicon" trend of development.

According to Mr James consultation reports, in recent years the "solid state sensors, actuators and Microsystems forum" (The Solid State Sensors Actuators and, Microsystems Workshop, is a new technology which is the highest level MEMS stage show, the International Symposium on the field of MEMS is one of the most competitive Conference), appeared to practitioners of silicon materials feel uneasy about the trend: the quantity of silicon material and technology papers decreased year by year. In the June 2016 workshop, only 53% of the speech papers were on silicon material devices (as long as the devices contained silicon material, either as passive substrate or as active material).

Solid state sensors, actuators and Microsystems symposium, silicon devices, lecture papers, percentage

It is clear from the topic of speech over the past 12 years that the academic research craze for silicon materials micro devices has begun to fade. Academic researchers are now focusing on developing polymers and paper based microdevices. The devices developed with these materials are not only environmentally friendly, but also easy to manufacture and low in cost. Relative to silicon materials, they substantially reduce R & D budget. Many innovations in polymers and paper based devices point to medical applications, and biocompatibility and material flexibility are essential requirements for the field.

In the face of this industry development trend, independent research and development of advanced applications of ion beam technology equipment to usher in the spring. The four generation Aidewansidi ion beam technology application system can process a wide range of materials, can be used for etching processing all kinds of metal, alloy, metal, oxides, nitrides, carbides, semiconductors, polymers, ceramics, infrared, superconducting and biological tissue and other materials.

Advanced has been initially built into the whole industry chain of ecological layout independent equipment development + technology + R & D project to accelerate the incubation + OEM production base ". With the cooperative operation of domestic well-known cubic astatine accelerator enterprises, backed by the wealth capital and many other branches of industry fund docking Ed million Siwei nano manufacturing industry to accelerate the incubators will be inaugurated. The vertical industry to accelerate the incubator has a high degree of attention, serious vertical features, government financing and external capital involvement, will boost the rapid growth of enterprises. Ed Vance also plans to build a production base in Shenzhen. As in the past will strive to build the equipment advanced technology research and development, increase efforts to make good use of industrial capital fast hatching, build professional OEM base for China's industrial upgrading and transformation of contribution.